An ion and electron beams multifunction equipment for materials surface treating

Ningkang Huang; Minghua Wang; Yong Shen; Xianen Wang; Huacong Guo

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An ion and electron beams multifunction equipment for materials surface treating

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- An ion and electron beams multifunction equipment for materials surface treating
- Nuclear Techniques Vol. 11, Issue 8, (1988)
- 作者机构：
  
  四川大学原子核科学技术研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：30 March 1987，
  
  Published：1988-08
- 稿件说明：
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Ningkang Huang, Minghua Wang, Yong Shen, et al. An ion and electron beams multifunction equipment for materials surface treating[J]. Nuclear techniques, 1988, 11(8): 33-37.
DOI：

Ningkang Huang, Minghua Wang, Yong Shen, et al. An ion and electron beams multifunction equipment for materials surface treating[J]. Nuclear techniques, 1988, 11(8): 33-37. DOI：

摘要

本设备由以下系统组成：注入系统，有溅射离子源及不对称三电极加速管，能量50keV，流强4mA（N

）；电子束系统，能量45keV，功率密度10

—10

W/cm

；配备微机程序的束偏摆装置；靶材易换的磁控溅射靶；可作旋转、平移、升降等机械运动的高真空工作室（

500×1600mm）。可进行离子注入及混合、电子束上釉及合金化、磁控溅射离子镀等工艺。该设备为材料表面改性和薄膜制备提供了新的手段。

Abstract

Described is an equipment consisting of several systems as follows: an ion system

having a sputtering ion source and an asymmetric three electrode acceleration tube

operated at 50 keV with a beam current up to 4 mA (for N

) ; an electron beam system operated at up to 45 keV with beam power densities of 10

-10

W/cm

; a microcomputer device for electron beam deflecting; a magnetron sputtering device capable of easily altering the targ materials and a large high vacuum work chamber (500×1600 mm) with rotary

translation and up-down mechanical scannings

A variety of surface treating (ion implantation

ion mixing

electron beam glazing and alloying

magnetron sputtering ion plating etc.) can be made with this equipment. Several experiments have proved that this equipment is versatile for materials

surface modification and preparation of solid films.

关键词

Keywords

references

B. Y. Tsaur et al . , Appl. Phys. Lett. , 36 （ 1980 ）， 10 ： 823 .

黄宁康等，微细加工技术，（ 1986 ) 1 ： 10 。

黄宁康，核科学与工程， 6 （ 1986 ）， 1 ： 88 。

K. J. Hill et al . , AERE - R 6343 ( 1970 ）.

黄宁康和王明华，真空，（ 1987 ）， 6 ： 43 。

黄宁康等，机械工程材料， 11 ( 1987 )， 4 :.

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Related Institution

School of Science, Tianjin University

Tianjin Key Laboratory of Low Dimensional Materials Physics and Preparation Technology

College of Nuclear technology,Chemistry and Biology,Hubei University of Science and technology,Xianning 437100,China) 2

四川大学原子核科学技术研究所

Department of Physics,Heze University,Heze 274015,China) 2

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