In the analysis of environment samples for nuclear diagnosis and nuclear safeguard technology

it is very important to analyze the elemental and isotopic compositions of uranium aerosol particles (usually very few and in μm-size). The combination of SEM (scanning electron microscope) and SIMS (secondary ion mass spectrometer) is one of the accepted working lines to analyze isotopic compositions of particles. But it required fast searching and accurate locating the interested particles on the sample planchet in SEM and then re-locating the particles and analyzing their isotopic composition in SIMS. This paper describes the method of making reference marks on 25mm diameter graphite planchet by using nuclear track membrane and presents the result of relocation of simulated particles from SEM to SEM. The study shows that the average deviation of relocation is 5.8±2.6μm with reference marks by using nuclear track membrane. The accuracy is not lower than that by using other patterns’ reference marks.