Comparison of different Monte Carlo simulation software for simulating neutron depth profiling

Su XU; Qingxian ZHANG; Qingju HE; Tao WU; Gang ZHANG; Cong SHI; Kun SUN; Yunlong XIAO

doi:10.11889/j.0253-3219.2018.hjs.41.090203

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Comparison of different Monte Carlo simulation software for simulating neutron depth profiling

LOW ENERGY ACCELERATOR, RAY AND APPLICATIONS | 更新时间：2021-05-19

- Comparison of different Monte Carlo simulation software for simulating neutron depth profiling
- NUCLEAR TECHNIQUES Vol. 41, Issue 9, Article number: 090203(2018)
- 作者机构：
  
  成都理工大学核技术与自动化工程学院成都 610059
- 作者简介：
- 基金信息：
  
  Sichuan Science and Technology Project;Sichuan Education Department Science and Technology Project
- DOI：10.11889/j.0253-3219.2018.hjs.41.090203
  CLC： TL99
- Received：23 January 2018，
  
  Revised：17 April 2018，
  
  Published：2018-09
- 稿件说明：
移动端阅览
Su XU, Qingxian ZHANG, Qingju HE, et al. Comparison of different Monte Carlo simulation software for simulating neutron depth profiling[J]. Nuclear techniques, 2018, 41(9): 090203
DOI：

Su XU, Qingxian ZHANG, Qingju HE, et al. Comparison of different Monte Carlo simulation software for simulating neutron depth profiling[J]. Nuclear techniques, 2018, 41(9): 090203 DOI： 10.11889/j.0253-3219.2018.hjs.41.090203.

摘要

中子深度剖面分析（Neutron depth profiling，NDP）技术在半导体生产、离子注入研究、材料科学等领域有广泛应用。为了探究NDP能谱分析中模拟软件的一致性与可靠性，本文对比了SRIM、MCNP、FLUKA和GEANT4等软件模拟NDP的结果；对比分析了4款模拟软件模拟的α粒子能谱，并以美国国家标准与技术研究院（National Institute of Standards and Technology，NIST）标准物质SRM2137实测谱为标准对模拟谱进行评价。结果表明：4款模拟软件所模拟的α能谱在2μm厚晶体硅层内峰位能量一致性较好；MCNP模拟的半高宽和峰位结果优于FLUKA和GEANT4的模拟结果。

Abstract

Background

Neutron depth profiling (NDP) method is widely used in semi-conductor production

ion implantation research

material science and other fields.

Purpose

This study aims to explore the reliability of simulation software in NDP energy spectrum analysis

and compare the results of simulating NDP by SRIM

MCNP

FLUKA

and GEANT4.

Methods

First of all

the differences of four software in simulation for alpha spectrum are discussed. Then

the experimental alpha spectrum of National Institute of Standards and Technology (NIST) standard is used to evaluate the simulation results of MCNP

FLUKA and GEANT4 in NDP analysis.

Results

The simulation results of alpha spectrum show that the peak position of alpha spectrum is close to each other when the thickness of silicon is less than 2μm.

Conclusions

Three software

i.e.

MCNP

FLUKA and GEANT4

could be used to simulate the alpha spectrum in NDP analysis whilst the MCNP achieves better accurate full width at half maximum (FWHM) and the peak position of alpha spectrum.

关键词

Keywords

references

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