The Fresnel Au-zone plates and the multiple-pin-hole Au-foils are microfabricated using ion beam etching technique. The key points how to determine the etching rate and the relation between terrace sloping angle and etching parameters are indicated. The plates and foils so obtained have greatly improved the resolving power of the coded imaging camera and have been successfully used to measure the spacial distribution of laser plasma and to diagnose of nuclear fusion.