LUO YinHong GUO HongXia ZHANG FengQi YAO ZhiBin HE BaoPing. Electron beam irradiation effect on GaN HEMT[J]. Nuclear techniques, 2011, 34(7): 507-511.DOI:
GaN HEMTs(High Electron Mobility Transistor) were irradiated by 0.8 and 1.2 MeV electron beams
and the irradiation effects were investigated.The results show that the device damage caused by 0.8 MeV electrons is more serious than that by 1.2 MeV electrons.Saturation drain current increase and threshold voltage negative shift are due to trapped positive charge from ionization in the AlGaN layer and N
Ga vacancy from non-ionizing energy loss in the GaN layer.Electron traps and trapped positive charges from non-ionizing in the AlGaN layer act as trap-assisted-tunneling centers that increase the gate leakage current.