In this paper

the one-dimensional particle-in-cell/Monte Carlo collision model is used to simulate time evolution of the Ar discharges produced by a single-frequency capacitively coupled reactor

by considering the elastic and inelastic collisions between Ar

Ar+

Ar* and electrons.The results show that the sheath near the powered electrode is formed in a short time and thickness of the sheath increases with the simulation time

while fluxes of the electrons and Ar+ ions at the powered electrode decrease with increasing time.The flux

potential

current and sheath thickness reach their equilibrium in a few hundred microseconds.The plasma density

potential

electric field and averaged energy are discussed.