The C

Ti and Ti+ C ions were implanted into H13 steel

and the cross-sections of the samples were observed by TEM. It is shown that the implanted layer structure has greatly changed. The complex mosaic layer with nano-meter phase is formed.The thickness of the complex layer is greater than the corresponding ion range. The difference of structure among the three ion implanted layers is obvious. The collision parameters of the ions were calculated using TRIM95

showing that the structure change is closely related to the collision parameters of the ions in steel

Finally the close coordination of structure change with implanted conditions were studied.