YU Xuefeng AI Erken REN Diyuan GUO Qi ZHANG Guoqiang LU Wu. Hot-carrier injection induced interface states in MOS structure and their annealing characteristics[J]. Nuclear techniques, 2006, (1): 19-21.
YU Xuefeng AI Erken REN Diyuan GUO Qi ZHANG Guoqiang LU Wu. Hot-carrier injection induced interface states in MOS structure and their annealing characteristics[J]. Nuclear techniques, 2006, (1): 19-21.DOI:
By hot-carrier injecting and room temperature annealing repeatedly
responses of the MOS structure to the hot-carrier injection and annealing characteristics have been studied using the technique of c-v analyses. The mechanism of hot-carrier injection induced damage in the MOS structure has also been investigated in view of generation and annealing of the interface states.