In this paper

was reported preparation of 10B film as neutron convertor used in GEM-based thermal neutron detector.The boron target was prepared using pressurized vacuum sintering of boron powder.It is found that the 10B content in the target was closely related to the vacuum environment.The 10B film was evaporated on an Al-coated polyimide film via pulsed laser deposition(PLD).At 100℃ of the substrate

growth rate of the boron film was about 0.56 nm/min.Composition of the film was analyzed by XPS.The XPS data shows that it consists of boron and borides

both of that can be used as neutron convertor layer.